Материалы и технологии изготовления нано- и микро-электромеханических систем НЭМС/МЭМС
“It was the best of times, it was the worst of times, it was the age of wisdom, it was the age of foolishness…” from A Tale of Two Cities by Charles Dickens, engraved on a thin silicon nitride membrane. The entire page measures a mere 5.9 μm on a